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I worked at Samsung when they just got done transitioning from rail-guided vehicles to an overhead handling system. The automation rate easily compensates for any specific end to end delays. You can have thousands of test wafers in flight at various stages with one line and not even impact production wafers. The scheduling, transportation and execution logic is where all the margin happens. Moving materials in physical space is the most expensive part of the process. Minimizing moves is critical. The direct monetary cost pales in comparison to the yield risk that arises each time you touch a box of wafers.

(2024)? (1970)?

Good read about the history of IBM during WWII

https://en.wikipedia.org/wiki/IBM_and_the_Holocaust